Advertisement

Picture EBD Group BioPharm America 2017 BPA Boston MA September 600x60px
Document › Details

Hiden Analytical Ltd.. (1/22/14). "Press Release: Vacuum Process Gas Analyser".

Organisation Organisation Hiden Analytical Ltd.
Products Product HPR-30 vacuum process gas analyser MS system
  Product 2 gas analyser
     


The compact Hiden HPR-30 differentially-pumped mass spectrometer enables real-time measurement and control of gas composition in vacuum processes in the pressure regime 1mbar to 10E-4mbar, addressing multiple process areas including vacuum coating, plasma etching, sputter deposition, CVD/MOCVD and RIE.

The system mounts directly to the process chamber with the close-coupled re-entrant sample extractor tube inserted directly into the process environment for fastest response to status changes in the gas composition, the integral differential turbo-molecular pump ensuring the mass spectrometer(MS) continues to operate within a UHV environment through process pressures up to 1mbar. Alternatively the HPR-30 can be cart-mounted with remote process system coupling for qualitative gas analysis and for leak detection.

The system is fully PC controlled and programmable for automatic operation and data reporting. Multiple input channels enable process data such as process pressure, temperature, feed-gas admission/shutoff status for example to be fully integrated with the acquired mass spectra.

For further information on this or any other Hiden Analytical products contact Hiden Analytical at info@hiden.co.uk or visit the main website at www.HidenAnalytical.com.


---- ends ----

Hiden Analytical Ltd
420 Europa Boulevard, Warrington, WA5 7UN, England
tel: +44 (0)1925 445 225 o email: info@hiden.co.uk

   
Record changed: 2016-01-10

Advertisement

Picture EBD Group Bio-Europe 2017 BEU Berlin Germany November 600x60px

More documents for Hiden Analytical Ltd.


To subscribe to our free, monthly mass spectrometry newsletter, please send an e-mail to info@iito.de and simply fill the subject line with the word »MSC newsletter«

To get even more information, please take a look at our [gs] professional services offering and read the gene-sensor Product Flyer [PDF file]

Please visit also our web portals for the Eurpean life sciences and the life sciences in German-speaking Europe (DE, AT & CH) at Life-Sciences-Germany.com and Life-Sciences-Europe.com

Advertisement

Picture Eurasanté BioFIT 2017 Strasbourg France November 600x60px




» top

Advertisements

Picture [iito] Twitter iitoLifeScience Life Sciences Mass Spec 120x120px Picture Eurasanté BioFIT 2017 Strasbourg France November 120x80px Picture EBD Group Bio-Europe 2017 BEU Berlin Germany November 120x80px Picture BIO Deutschland EBDC 2017 Heidelberg 120x240px Picture EBD Group BioPharm America 2017 BPA Boston MA September 120x180px Picture [LSE] Life-Sciences-Europe.com – The Business Web Portal 120x600px Banner Fairtec GmbH Solutions for Smarter Business Events Exhibitions 120x120px Picture [iito] Twitter iitoLifeScience Life Sciences Mass Spec 120x120px Picture Eurasanté BioFIT 2017 Strasbourg France November 120x80px Picture BIO Deutschland EBDC 2017 Heidelberg 120x240px Picture EBD Group BioPharm America 2017 BPA Boston MA September 120x180px Picture EBD Group Bio-Europe 2017 BEU Berlin Germany November 120x80px