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JEOL Ltd.. (8/10/15). "Press Release: Release of a New Field Emission Scanning Electron Microscope JSM-7200F".

Organisation Organisation JEOL Ltd. (JP)
  Group JEOL (Group)
Product Product JSM-7200F FE-SEM
Person Person Kurihara, Gon-emon (JEOL 201108 President)

- Multi-purpose FE-SEM combining high-resolution and easy operation -

JEOL Ltd. (President Gon-emon Kurihara) announces the development of a new field emission scanning electron microscope, JSM-7200F, which will be available for sale from August 2015.

Product development background

Scanning electron microscopes have been used in a wide range of fields and for diverse applications. The JSM-7200F utilizes JEOL proprietary in-lens Schottky Plus technology that allows improvement in the resolution at low accelerating voltages (1.6 nm @ 1 kV), and achieves maximum probe current of 300 nA. The JSM-7200F is a multi-purpose FE-SEM that can satisfy a wide range of needs with both higher resolution and easier operation than conventional instruments.

Main Features

> High resolution

High resolution of 1.6 nm (at 1 kV), 1.2nm(at 30kV)

> High-speed analysis

Maximum probe current of 300 nA, allowing short acquisition time for EDS, WDS, and EBSD, while maintaining high resolution.

> Energy signal differentiation

Incorporation of the TTL (through-the-lens) system in the standard configuration enables the use of energy filtering to selectively differentiate the electron energies.

> Wide area analysis

The LDF (long depth of field) mode enables applications like wide-area EBSD analysis, without the need to use stage scan (montage)

Main Specifications

1.6 nm (at accelerating voltage 1 kV),
1.2 nm (at accelerating voltage 30 kV)
3.0 nm (at accelerating voltage 15 kV, WD 10 mm,
probe current 5 nA / Analysis condition)

×10 to ×1,000,000

Imaging modes
Secondary electron image, Backscattered electron image

Accelerating voltage 0.01 to 30 kV
Probe current 1 pA to 300 nA
Electron gun In-lens Schottky field emission gun
Motor control 5-axis motor drive stage
Stage movement X – Y : 35 mm x 50 mm, Z: 2.0 to 41 mm
Tilt: – 5 to 70°, Rotation: 360° endless
Specimen exchange chamber Included in the standard configuration


Annual unit sales target
70 units/ year (initial year)


JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.

For more information about JEOL Ltd. or any JEOL products, visit

Record changed: 2019-06-09


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